HS-20 Diffusion Pump
Technical Specifications
Pumping Speed, Operating Range Pumping Speed, AVS 4.1 (1963) |
10,000 l/s air, 12,500 l/s He and H2 17,500 l/s Air |
Maximum Throughput | 12.5 T-l/s (16.7 mbar l/s) in operating range, 18 T-l/s (23 mbar-l/s) @ 0.01 torr |
Operating Range | 1.3 x 10-3 to 5 x 10-8 torr (1.7 x 10-3 to 6.5 x 10-8 mbar) |
Maximum Forepressure | No Load: 0.65 torr (0.85 mbar) Full Load: 0.55 torr (0.72 mbar) |
Recommended Backing Pump | ɛ100 cfm (170 m3/hr) |
Backstreaming Rate, Standard Cold Cap | <1.5 x 10-3 mg/cm2/min |
Warmup Time | 45 minutes |
Cooldown Time | 85 minutes |
Fluid Charge | 5 quarts (4.7 liters) |
Electrical Requirements | 3 ph, 50/60 Hz, 240/415/480 VAC |
Pump Power | 12,000 watts |
Cooling Water Requirements | 1.5 gpm (300 l/hr) at 60-80°F (15-26°C) |
Water Connections | 1⁄4 in. FPT Tee |
Recommended Fluid | DC-704 |