冰研應用股份有限公司Advanced HiVac Application Co., LTD
  

NHS-35 Diffusion Pump



NHS-35 Manual.pdf

Technical Specifications

Pumping Speed, Operating Range Pumping Speed, AVS 4.1 (1963) 28,000 l/s air, 35,000 l/s He and H2 50,000 l/s Air
Maximum Throughput 25 T-l/s (33 mbar l/s) in operating range, 35 T-l/s (45 mbar-l/s) @ 0.01 torr
Operating Range 9 x 10-4 to < 5 x 10-8 torr (1.2 x 10-3 < 6.5 x 10-8 mbar)
Maximum Forepressure No Load – 0.55 torr (0.71 mbar), Full Load – 0.40 torr (0.52 mbar)
Recommended Backing Pump ≥ 300 cfm (510 m3/hr)
Backstreaming Rate, Standard Cold Cap <5 x 10-4 mg/cm2/min
Warmup Time 60 minutes
Cooldown Time 180 minutes
Fluid Charge 3 U.S. gallons (11.3 liters)
Electrical Requirements 3 ph, 50/60 Hz, 240/415/480 VAC
Pump Power 24,000 watts
Cooling Water Requirements 4 gpm (800 l/hr) at 60-80°F (15-26°C)
Recommended Fluid DC-704

 



 

 

 

 

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